Study of lift-off layers in spindt cathode fabrication

被引：0
|
作者：
Li, Xinghui [1 ]
Bai, Guodong [1 ]
Li, Hanyan [1 ]
Ding, Mingqing [1 ]
Feng, Jinjun [1 ]
Liao, Fujiang [1 ]
机构：
[1] National Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing 100015, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2013年 / 33卷 / 04期
关键词：
D O I：
10.3969/j.issn.1672-7126.2013.04.02
中图分类号：
学科分类号：
摘要：
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页码：303 / 308
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