MEMS and micromachining laboratory, department of micro-nano systems engineering, graduate school of engineering, Nagoya University

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| 1600年 / Japan Society for Precision Engineering, Kudan Seiwa Bldg, 1-5-9 Kudan-Kita, Chiyoda-ku, Tokyo, 102-0073, Japan卷 / 79期

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10.2493/jjspe.79.921

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