Simplified microfabrication technology for producing SU-8 microstructures with high aspect ratio

被引：0
|
作者：
Lu, Chun-Hua [1 ]
Yin, Xue-Feng [1 ]
Liu, Dong-Yuan [1 ]
Fang, Zhao-Lun [1 ]
机构：
[1] Department of Chemistry, Zhejiang University, Hangzhou 310027, China
来源：
Zhejiang Daxue Xuebao (Gongxue Ban)/Journal of Zhejiang University (Engineering Science) | 2006年 / 40卷 / 08期
关键词：
11;
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页码：1289 / 1292
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