Effect of pulse energy of femtosecond laser on the formation of spikes on the silicon surface in the ambient gas of SF6

被引：0
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作者：
机构：
[1] Wen, Ya
[2] Peng, Yan
[3] Zhang, Dongsheng
[4] Chen, Hongyan
[5] Chen, Lin
[6] Zhu, Yiming
来源：
Zhu, Y. (ymzhu@usst.edn.cn) | 1600年 / Science Press卷 / 39期
关键词：
Nonlinear optics;
D O I：
10.3788/CJL201239.0406001
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