Research on the angular vibration measurement of miniaturized triaxial FBG vibration sensor

To solve the problems of small available space, complex structure, and difficult assembly of structural parts in the development of the miniature three-axis vibration sensor, this article proposes the use of three integrated module staggered combinations of the sensor design method to improve the space utilization rate and assembly accuracy. Through theoretical analysis and finite element simulation, the optimized design of the 15 mm×15 mm×15 mm miniaturized sensor is completed. The microscope imaging packaging system and the vibration testing system are established to complete the packaging and performance testing of the sensor. Experiments show that the resonant frequencies of X, Y, and Z axes of the sensor are 990, 975, and 960 Hz, respectively. The flatness is good in the frequency range of 0~700 Hz, and the sensitivities are 19. 10, 19. 28, and 20. 01 pm/ g, respectively, which has the advantages of lightweight and high consistency of the performance of the three-axis test. A micro-angular vibration test system is built to evaluate the performance of the sensor, which has an angular displacement measurement resolution better than 0. 21 μrad and a linearity of 0. 998. © 2024 Science Press. All rights reserved.