Design and application of test structure array based on modular unit

被引：0
|
作者：
机构：
[1] Zhang, Bo
[2] Pan, Wei-Wei
[3] Ye, Yi
[4] Zheng, Yong-Jun
[5] Shi, Zheng
[6] Yan, Xiao-Lang
来源：
Shi, Z. (shiz@vlsi.zju.edu.cn) | 1600年 / Zhejiang University卷 / 47期
关键词：
Integrated circuits;
D O I：
10.3785/j.issn.1008-973X.2013.05.015
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学科分类号：
摘要：
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