Improvement of iterative error-correction method in laser direct writing

被引：0
|
作者：
Zhang, Shan [1 ]
Tan, Jiu-Bin [1 ]
Wang, Lei [1 ]
Cheng, Tao [1 ]
机构：
[1] Institute of Ultra-precision Optical and Electronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 02期
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学科分类号：
摘要：
12
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页码：317 / 325
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