High-resolution Fourier transform lens

被引:0
|
作者
Zhang, Lei [1 ,2 ]
Zhong, Xing [1 ,2 ]
Jin, Guang [1 ]
Jia, Ji-Qiang [1 ]
机构
[1] Changchun Institute of Optics Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
[2] Graduate School, Chinese Academy of Sciences, Beijing 100039, China
关键词
Fourier transform lens - Optomechanical structure - Software ZEMAX - Vacuum cavity structure;
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中图分类号
学科分类号
摘要
According to the theory of geometrical optics and the requirements of a particle observation experiment, the systematic initial parameters were researched and a 532 nm Fourier transform lens was designed using ZEMAX. The optomechanical structure was designed according to the system feature. By using the software of finite element method, the influence of vacuum on optics spacing and mirror surface shape was analyzed. The analytical and experimental results indicate that the changes of optics spacing and mirror surface shape caused by vacuum can not affect on the imaging quality. The testing experiment using the visual microscope shows that the system resolution is 2.81μm. After the alignment, the system can keep low-vacuum (lower than 100 Pa) for 12 h. The system has already been used in the particle observation experiment successfully.
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页码:1317 / 1321
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