Fabrication of ultra-flat c-axis oriented ZnO thin films on atomically stepped cyclo-olefin polymer (COP) substrates by pulsed laser deposition at RT

被引：1

作者：

Oga T. ^{[1
]}

Yamada S. ^{[1
]}

Kaneko N. ^{[1
]}

Kaneko S. ^{[1
,2
]}

Matsuda A. ^{[1
]}

Yoshimoto M. ^{[1
]}

机构：

[1] Department of Materials Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori, Yokohama

[2] Kanagawa Institute of Industrial Science and Technology, 705-1 Shimoimaizumi, Ebina, Kanagawa

来源：

Oga, Tomoaki (oga.t.ab@m.titech.ac.jp) | 1600年 / IOP Publishing Ltd卷 / 59期

关键词：

Fabrication - Metallic films - Pulsed lasers - Thin films - Polymer films - II-VI semiconductors - Zinc oxide - Morphology - Optical films - Substrates - Sapphire - Surface morphology;

D O I：

10.35848/1347-4065/abc65e

中图分类号：

学科分类号：

摘要：

Highly crystalline c-axis oriented ZnO thin films with ultra-flat surfaces were fabricated by pulsed laser deposition at RT on 0.3 nm high atomically stepped cyclo-olefin polymer (COP) substrates whose surfaces were thermally nanoimprinted using atomically stepped sapphire molds. X-ray diffraction and atomic force microscopy measurements showed that the atomically-controlled surfaces of COP substrates enhanced the c-axis orientation and surface flatness of the crystalline ZnO thin films. The ZnO thin films grown on the atomically stepped COP substrates exhibited atomically stepped surface morphology, and also the optical bandgap of about 3.3 eV and RT resistivity of 5.0 × 10−2 Ω cm. © 2020 The Japan Society of Applied Physics

引用

共 35 条

[1] Fabrication of ultra-flat c-axis oriented ZnO thin films on atomically stepped cyclo-olefin polymer (COP) substrates by pulsed laser deposition at RT
Oga, Tomoaki
Yamada, Shiori
Kaneko, Naho
Kaneko, Satoru
Matsuda, Akifumi
Yoshimoto, Mamoru
JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59 (12)
[2] Pulsed laser deposition of c-axis oriented aluminum nitride thin films on silicon
Tabbal, M
Mérel, P
Chaker, M
Pépin, H
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2001, 14 (02): : 115 - 119
[3] Low-temperature c-axis oriented growth of nanocrystalline ZnO thin films on Si substrates by plasma assisted pulsed laser deposition
Shao, J.
Shen, Y. Q.
Sun, J.
Xu, N.
Yu, D.
Lu, Y. F.
Wu, J. D.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 26 (01): : 214 - 218
[4] Highly c-Axis Oriented ZnO Thin Films on Glass Substrate by Pulsed Laser Deposition: Fluence-Dependent Effects
Zandalazini, C.
Oliva, M.
Ferrero, J. C.
JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, 2019, 14 (10) : 1461 - 1467
[5] Growth methods of c-axis oriented MgB2 thin films by pulsed laser deposition
Ferrando, V
Amoruso, S
Bellingeri, E
Bruzzese, R
Manfrinetti, P
Marré, D
Velotta, R
Wang, X
Ferdeghini, C
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2003, 16 (02): : 241 - 245
[6] Structure and Photoluminescence of C-axis Oriented Nnanocrystalline ZnO Films Synthesized by Plasma Assisted Pulsed Laser Deposition
Gan, Jie
Gao, Kun
Li, Qian
Sun, Jian
Xu, Ning
Wu, Jiada
TENCON 2010: 2010 IEEE REGION 10 CONFERENCE, 2010, : 981 - 985
[7] LOW-TEMPERATURE GROWTH OF HIGHLY TRANSPARENT C-AXIS ORIENTED ZNO THIN-FILMS BY PULSED-LASER DEPOSITION
AMIRHAGHI, S
CRACIUN, V
CRACIUN, D
ELDERS, J
BOYD, IW
MICROELECTRONIC ENGINEERING, 1994, 25 (2-4) : 321 - 326
[8] Preparation of c-axis oriented thin films of LiCoO2 by pulsed laser deposition and their electrochemical properties
Iriyama, Y
Inaba, M
Abe, T
Ogumi, Z
JOURNAL OF POWER SOURCES, 2001, 94 (02) : 175 - 182
[9] In vitro dissolution and mechanical behavior of c-axis preferentially oriented hydroxyapatite thin films fabricated by pulsed laser deposition
Kim, Hyunbin
Camata, Renato P.
Chowdhury, Shafiul
Vohra, Yogesh K.
ACTA BIOMATERIALIA, 2010, 6 (08) : 3234 - 3241
[10] Highly c-axis oriented CaRuO3 thin films on LaAlO3 buffered Si(100) substrates by pulsed laser deposition
Tian, HY
Wang, J
Wang, Y
Qi, JQ
Wong, KH
Chan, HLW
Choy, CL
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2004, 201 (14): : R101 - R104

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