Stress-induced anisotropy of graphitelike amorphous carbon

被引：0
|
作者：
Zollner, Stefan [1 ]
Qin, Wentao [1 ]
Gregory, Richard B. [1 ]
Edwards, N.V. [1 ]
Junker, Kurt [1 ]
Tiwald, Thomas E. [2 ]
机构：
[1] Freescale Semiconductor, Inc., MD K10, 3501 Ed Bluestein Boulevard, Austin, TX 78721
[2] J.A. Woollam Co., 645 M Street, Lincoln, NE 68508, United States
来源：
Journal of Applied Physics | 2007年 / 101卷 / 05期
关键词：
Ellipsometry spectra of graphitelike amorphous carbon films on Si reveal a strong anisotropy of the optical constants in the 0.7-9.5 eV photon-energy range. The films are optically uniaxial; with the optical axis oriented normal to the surface. This birefringence can be explained by ordering of the hexagonal graphene planes perpendicular to the substrate due to tensile stress; which was confirmed by transmission electron microscopy. All films show two peaks in the optical absorption; corresponding to the ordinary and extraordinary absorption peaks in graphite. © 2007 American Institute of Physics;
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