Effects of homo-buffer layer on properties of sputter-deposited ZnO films

被引:0
|
作者
Huang, Jian [1 ]
Wang, Linjun [1 ]
Xu, Run [1 ]
Shi, Weimin [1 ]
Xia, Yiben [1 ]
机构
[1] School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China
来源
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:691 / 694
相关论文
共 50 条
  • [31] Effects of radio frequency power on structural, optical, and electronic properties of sputter-deposited ZnO:B thin films
    Lian-Hong Wong
    Yi-Sheng Lai
    Applied Physics A, 2018, 124
  • [32] EFFECTS OF NITROGEN PULSING ON SPUTTER-DEPOSITED BERYLLIUM FILMS
    HSIEH, EJ
    PRICE, CW
    PIERCE, EL
    WIRTENSON, RG
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 2165 - 2168
  • [33] THE EFFECTS OF OXYGEN CONCENTRATION IN SPUTTER-DEPOSITED MOLYBDENUM FILMS
    BARDIN, TT
    PRONKO, JG
    BUDHANI, RC
    LIN, JS
    BUNSHAH, RF
    THIN SOLID FILMS, 1988, 165 (01) : 243 - 247
  • [34] Role of oxygen atoms in the growth of magnetron sputter-deposited ZnO films
    Jie, Jin
    Morita, Aya
    Shirai, Hajime
    JOURNAL OF APPLIED PHYSICS, 2010, 108 (03)
  • [35] THERMAL-STABILITY OF SPUTTER-DEPOSITED ZNO THIN-FILMS
    SONG, Y
    KIM, ES
    KAPILA, A
    JOURNAL OF ELECTRONIC MATERIALS, 1995, 24 (02) : 83 - 86
  • [36] Effects of the Process Parameters on the Properties of Sputter-Deposited Tin Oxide Thin Films
    Woo, Sang Woo
    Seo, Han Byeol
    Choi, Jinsung
    Bae, Byung Seong
    Yun, Eui-Jung
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2019, 19 (03) : 1301 - 1307
  • [37] Chemical activity of oxygen atoms in the magnetron sputter-deposited ZnO films
    Morita, Aya
    Watanabe, Ikuo
    Shirai, Hajime
    THIN SOLID FILMS, 2011, 519 (20) : 6903 - 6909
  • [38] Scaling of surface roughness in sputter-deposited ZnO:Al thin films
    Mohanty, Bhaskar Chandra
    Choi, Hong-Rak
    Cho, Yong Soo
    JOURNAL OF APPLIED PHYSICS, 2009, 106 (05)
  • [39] Structural and Raman Scattering Properties of ZnO:Al Thin Films Sputter-Deposited at Room Temperature
    Mohanty, Bhaskar Chandra
    Kim, Byeong Kon
    Yeon, Deuk Ho
    Jo, Yeon Hwa
    Choi, Ik Jin
    Lee, Seung Min
    Cho, Yong Soo
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2012, 159 (02) : H96 - H101
  • [40] Optical properties of PZT thin films deposited on a ZnO buffer layer
    Schneider, T.
    Leduc, D.
    Cardin, J.
    Lupi, C.
    Barreau, N.
    Gundel, H.
    OPTICAL MATERIALS, 2007, 29 (12) : 1871 - 1877