Comprehensive x-ray photoelectron spectroscopy study on compositional gradient lanthanum silicate film

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作者：
Kakushima, K. [1 ]
Tachi, K. [2 ]
Song, J. [2 ]
Sato, S. [2 ]
Nohira, H. [3 ]
Ikenaga, E. [4 ]
Ahmet, P. [2 ]
Tsutsui, K. [1 ]
Sugii, N. [1 ]
Hattori, T. [2 ]
Iwai, H. [2 ]
机构：
[1] Interdisciplinary Graduate School of Science, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
[2] Frontier Research Center, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
[3] Department of Electrical and Electronic Engineering, Tokyo City University, 1-28-1 Tamazutsumi, Setagaya-ku, Tokyo 158-8557, Japan
[4] Japan Synchrotron Radiation Research Institute, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
来源：
Journal of Applied Physics | 2009年 / 106卷 / 12期
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