Terahertz metal bi-grating fabrication using ultra-thick photoresist process

被引：0
|
作者：
Shan, Yunchong [1 ,2 ,3 ]
Ruan, Jiufu [1 ,2 ]
Yang, Jun [1 ,2 ]
Deng, Guangsheng [1 ,2 ]
Lü, Guoqiang [1 ,2 ]
机构：
[1] Key Laboratory of Special Display Technology(Hefei University of Technology), Ministry of Education, Hefei 230009, China
[2] Academy of Photoelectric Technology, Hefei University of Technology, Hefei 230009, China
[3] School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology, Hefei 230009, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2014年 / 26卷 / 05期
关键词：
Aspect ratio;
D O I：
10.11884/HPLPB201426.053102
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Ka-band filter fabrication based on optimized ultra-thick SU-8UV-lithographical process
    Jin, P
    Jiang, K
    Tan, JB
    PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 3, 2004, : 409 - 412
  • [22] Surface roughness and geometrical characterization of ultra-thick micro moulds for ceramic micro fabrication using soft lithography
    Hassanin, H.
    Ostadi, H.
    Jiang, K.
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2013, 67 (9-12): : 2293 - 2300
  • [23] Surface roughness and geometrical characterization of ultra-thick micro moulds for ceramic micro fabrication using soft lithography
    H. Hassanin
    H. Ostadi
    K. Jiang
    The International Journal of Advanced Manufacturing Technology, 2013, 67 : 2293 - 2300
  • [24] Process conditions and lithographic performance of Arch Durimide™ polyimides in the ultra-thick film
    Misat, SI
    Pellens, R
    Voets, R
    van Klaveren, A
    Van der Heuvel, JP
    Peterson, L
    Waterson, P
    Racicot, D
    Roza, D
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII, 2003, 4979 : 410 - 421
  • [25] Detailed process analysis for glomerular capillary formation by immunofluorescence on ultra-thick sections
    Yu, Ting
    Zhang, Fang
    Wu, Yan
    Chen, Jianli
    Dai, Lu
    Li, Furong
    Liu, Xiaoliang
    Liu, Chi
    Zhao, Jinghong
    GENE EXPRESSION PATTERNS, 2020, 35
  • [26] Anode interface-stabilizing dry process employing a binary binder system for ultra-thick and durable battery electrode fabrication
    Lee, Jung Woo (jungwoolee@pusan.ac.kr), 1600, Elsevier B.V. (503):
  • [27] Aluminum Foil/Si Direct Bonding as Prototypes of Ultra-Thick Metal Contacts in Devices
    Liang, Jianbo
    Furuna, Katsuya
    Matsubara, Moeko
    Dhamrin, Marwan
    Nishio, Yoshitaka
    Shigekawa, Naoteru
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2017, 6 (09) : P626 - P632
  • [28] Investigation on stress and voids in ultra-thick metal (UTM) films with electrochemical plating processes
    Nie, Jia-Xiang
    Yang, Rui-Peng Ben
    Kang, Yun Winnie
    He, Wei-Ye
    Liu, Sheng Martin
    Kong, Xiang-Tao Jason
    CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2010 (CSTIC 2010), 2010, 27 (01): : 785 - 791
  • [29] Modelling and visual verification of combustion zone transfer in ultra-thick bed sintering process
    Zhang, Y. P.
    Zhang, J. L.
    Zhang, C.
    Wang, Y. Z.
    Liu, Z. J.
    Wang, G. W.
    Ma, F. T.
    Zhao, Z. X.
    IRONMAKING & STEELMAKING, 2017, 44 (04) : 304 - 310
  • [30] Ultra-thick micro-optical components using the PRISM photosensitive flexopolymer
    Sayah, Abdeljalil
    Parashar, Virendra K.
    Sivagnanam, Venkataragavalu
    Gijs, Martin A. M.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (10) : 2118 - 2124
12345