Basis mechanism of MIC poly-Si thin film material dynamic gettered technology and its applications

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Tianjin Key Laboratory of Photo-Electronic Thin Film Devices and Technology, Institute of Photo-Electronics, Nankai University, Tianjin 300071, China [1 ]
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Pan Tao Ti Hsueh Pao | 2007年 / 10卷 / 1574-1579期
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