A study of the surface profile measurement using a reference error free interferometer

被引：0
|
作者：
Department of Mechanical Eng., Akita Univ., Akita, 010-8502, Japan [1 ]
机构：
来源：
Key Eng Mat | 2008年 / 279-282期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Absolute measurement of the reference surface profile of a phase shifting interferometer
    Lim, Jun
    Rah, Seungyu
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (08):
  • [2] Unambiguous measurement of surface profile using a Sagnac interferometer with phase feedback
    Somervell, ARD
    Barnes, TH
    OPTICS COMMUNICATIONS, 1998, 150 (1-6) : 61 - 65
  • [3] Surface profile measurement of KB mirrors using Fizeau laser interferometer
    Qian, J.
    Assoufid, L.
    Liu, C.
    Shi, B.
    Liu, W.
    ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS III, 2010, 7801
  • [4] Measurement of space surface profile error using evolution algorithm
    2005, Science Press, Beijing, China (26):
  • [5] SURFACE PROFILE MEASUREMENT WITH A SCANNING DIFFERENTIAL AC INTERFEROMETER
    MAKOSCH, G
    DROLLINGER, B
    APPLIED OPTICS, 1984, 23 (24) : 4544 - 4553
  • [6] Absolute measurement of optical surface profile with a Fizeau interferometer
    Sasaki, Osami
    Watanabe, Akihiro
    Choi, Samuel
    Suzuki, Takamasa
    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II, 2012, 8563
  • [7] In-situ absolute measurement method for reference surface error of large aperture interferometer based on oblique incidence
    Zhou, You
    Liu, Shijie
    Bai, Yunbo
    Xu, Longbo
    Shao, Jianda
    ELEVENTH INTERNATIONAL CONFERENCE ON INFORMATION OPTICS AND PHOTONICS (CIOP 2019), 2019, 11209
  • [8] Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer
    Kim, Yangjin
    Sugita, Naohiko
    Mitsuishi, Mamoru
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXX, 2016, 9778
  • [9] Measurement of free surface velocities of copper plates by interferometer
    Sano, Y
    Abe, A
    Itoh, H
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 1999, 85 (1-3) : 158 - 161
  • [10] Surface roughness measurement by using interferometer and active interferometer stabilization
    Kim, Jin-Tae
    Kim, Dohyoung
    Kim, Hyun Su
    Park, Jong Rak
    ADVANCED NONDESTRUCTIVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS, 2006, 321-323 : 99 - 102
12345