Method cuts MEMS inspection times

A team of European researchers has developed a way to test several MEMS structures at a time under the EU's SMARTIEHS (SMART InspEction systems for High Speed and multifunctional testing of MEMS and MOEMS) project. The SMARTIEHS is developing a better and cheaper testing method for industry. The SMARTIEHS method involves an array of interferometers that can accurately identify an object's shape, changes in shape, and vibration. The idea of the project is to produce a specially designed glass wafer that contains 100 interferometers and use this to test 100 circuits on a MEMS wafer. The scientists will be able to measure the shape, deformation and resonant frequency of the MEMS chips and identify manufacturing faults.