Microstructure and properties of DLC film synthesized by plasma immersion ion implantation and deposition technique

被引:0
|
作者
Liu, Hong-Xi [1 ]
Jiang, Ye-Hua [1 ]
Zhou, Rong [1 ]
Tang, Bao-Yin [2 ]
机构
[1] Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650093, China
[2] State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:108 / 112
相关论文
共 50 条
  • [41] Microstructure and mechanical properties of CrN films fabricated by high power pulsed magnetron discharge plasma immersion ion implantation and deposition
    Wu, Zhongzhen
    Tian, Xiubo
    Wang, Zeming
    Gong, Chunzhi
    Yang, Shiqin
    Tan, Cher Ming
    Chu, Paul K.
    APPLIED SURFACE SCIENCE, 2011, 258 (01) : 242 - 246
  • [42] Characteristics of diamond-like carbon film synthesized on AISI 304 austenite stainless steel using plasma immersion ion implantation and deposition
    Liang, J. H.
    Chen, M. H.
    Tsai, W. F.
    Lee, S. C.
    Ai, C. F.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 257 (1-2 SPEC. ISS.): : 696 - 701
  • [43] Effect of ion beam implantation on density of DLC prepared by plasma-based ion implantation and deposition
    Oka, Y
    Kirinuki, A
    Suzuki, T
    Yatsuzuka, A
    Yatsui, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 242 (1-2): : 335 - 337
  • [44] Silicon coating deposition on NiTi substrate by plasma immersion ion implantation and deposition
    Kashin, O. A.
    Krukovskii, K. V.
    Slabodchikov, V. A.
    Lotkov, A. I.
    14TH INTERNATIONAL CONFERENCE GAS DISCHARGE PLASMAS AND THEIR APPLICATIONS, 2019, 1393
  • [45] Microstructure of β-FeSi2 film synthesized by ion implantation
    Li, XN
    Nie, D
    Dong, CA
    Ma, TC
    Jin, X
    Zhang, Z
    ACTA PHYSICA SINICA, 2002, 51 (01) : 115 - 124
  • [46] Blood compatibility and sp3/sp2 contents of diamond-like carbon (DLC) synthesized by plasma immersion ion implantation-deposition
    Chen, JY
    Wang, LP
    Fu, KY
    Huang, N
    Leng, Y
    Leng, YX
    Yang, P
    Wang, J
    Wan, GJ
    Sun, H
    Tian, XB
    Chu, PK
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 289 - 294
  • [47] Friction and Wear Behaviors and Rolling Contact Fatigue Life of TiN Film on Bearing Steel by Plasma Immersion Ion Implantation and Deposition Technique
    Liu, Hongxi
    Jiang, Yehua
    Zhou, Rong
    Tang, Baoyin
    ADVANCED TRIBOLOGY, 2009, : 732 - +
  • [48] Microstructure of interface for high-adhesion DLC film on metal substrates by plasma-based ion implantation
    Yatsuzuka, Mitsuyasu
    Oka, Yoshihiro
    Nishijima, Masahiko
    Hiraga, Kenji
    VACUUM, 2008, 83 (01) : 190 - 197
  • [49] Plasma immersion ion implantation as a technique in duplex and hybrid processing
    Matthews, A
    Leyland, A
    Wilson, A
    VACUUM, 2002, 68 (01) : 57 - 64
  • [50] Plasma immersion ion implantation - A fledgling technique for semiconductor processing
    Chu, PK
    Qin, S
    Chan, C
    Cheung, NW
    Larson, LA
    MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1996, 17 (6-7): : 207 - 280