Single Mask and Low Voltage of Micro Gripper Driven by Electrothermal V – Shaped Actuator

被引：0
|
作者：
Pham, Phuc Hong [1 ]
Van Bui, Dien [1 ]
机构：
[1] Hanoi University of Science and Technology, No.1, Daicoviet, Hai Ba Trung, Hanoi, Viet Nam
来源：
Mechanisms and Machine Science | 2022年 / 113 MMS卷
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
6th IFToMM Asian Mechanisms and Machine Science Conference, Asian MMS 2021
中图分类号：
学科分类号：
摘要：
Electrostatic actuators - Finite difference method - Grippers
引用
收藏
页码：693 / 704
相关论文
共 50 条
  • [31] Design and Modeling of Piezoelectrically Driven Micro-Actuator With Large Out-of-Plane and Low Driving Voltage for Micro-Optics
    Chen, Ssu-Han
    Michael, Aron
    Kwok, Chee Yee
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 28 (05) : 919 - 932
  • [32] Development of Electrothermal MEMS Mirror for Low Voltage Micro Optical Diffusion Sensor
    Kiuchi, Yuki
    Taguchi, Yoshihiro
    Nagasaka, Yuji
    2015 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2015,
  • [33] Micro-actuator with extended analog deflection at low drive voltage
    Duerr, Peter
    Gehner, Andreas
    Schmidt, Jan
    Kunze, Detlef
    Wagner, Michael
    Lakner, Hubert
    MOEMS DISPLAY, IMAGING, AND MINIATURIZED MICROSYSTEMS IV, 2006, 6114
  • [34] Single Actuator Tendon Driven Two Finger Linkage Gripper with Strong Pinch and Adaptable Cylindrical Grasp
    Unde, Jayant
    Colan, Jacinto
    Zhu, Yaonan
    Aoyama, Tadayoshi
    Hasegawa, Yasuhisa
    2023 32ND IEEE INTERNATIONAL CONFERENCE ON ROBOT AND HUMAN INTERACTIVE COMMUNICATION, RO-MAN, 2023, : 119 - 125
  • [35] A LOW VOLTAGE ELECTROSTATIC MICRO ACTUATOR FOR LARGE OUT-OF-PLANE DISPLACEMENT
    Towfighian, Shahrzad
    He, Siyuan
    Ben Mrad, Ridha
    PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2014, VOL 4, 2014,
  • [36] COORDINATED VOLTAGE CONVERSION AND LOW-POWER MICRO-ACTUATOR SWITCHING
    Oldham, Kenn
    Edamana, Biju
    Hahn, Bongsu
    PROCEEDINGS OF THE ASME DYNAMIC SYSTEMS AND CONTROL CONFERENCE AND BATH/ASME SYMPOSIUM ON FLUID POWER AND MOTION CONTROL (DSCC 2011), VOL 2, 2012, : 33 - 40
  • [37] Design, Modeling and Parametric Analysis of Chevron Shaped Electrothermal Actuator Using Low Cost MetalMUMPS Fabrication Process
    Saqib, Muhammad
    Saleem, Muhammad Mubasher
    Awan, Saif Ullah
    Rehman, Masood Ur
    2018 INTERNATIONAL CONFERENCE ON COMPUTING, ELECTRONIC AND ELECTRICAL ENGINEERING (ICE CUBE), 2018,
  • [38] Polymer actuator driven by ion current at low voltage, applied to catheter system
    Sewa, S
    Onishi, K
    Asaka, K
    Fujiwara, N
    Oguro, K
    MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 148 - 153
  • [39] Ultralight Nafion/Ag composite microfiber film actuator driven by low voltage
    Li, Xueying
    Yang, Jialong
    Zou, Kangkang
    Feng, Jiabao
    Pu, Wei
    Wang, Haolun
    SMART MATERIALS AND STRUCTURES, 2022, 31 (11)
  • [40] Low voltage driven piggy-back actuator of hard disk drives
    Naniwa, I
    Nakamura, S
    Saegusa, S
    Sato, K
    MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1999, : 49 - 52
12345