A novel method of induction electrode through-mask electrochemical micromachining

被引:0
|
作者
Yang, Xiaochen [1 ]
Du, Liqun [1 ,2 ]
Li, Aoqi [1 ]
Wu, Mengxi [1 ]
Wu, Changhao [1 ]
Li, Jingmin [1 ]
机构
[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province, School of Mechanical Engineering, Dalian University of Technology, Dalian,116024, China
[2] State Key Laboratory of High-performance Precision Manufacturing, School of Mechanical Engineering, Dalian University of Technology, Dalian,116024, China
基金
中国国家自然科学基金;
关键词
43;
D O I
10.1016/j.ijmachtools.2024.104221
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] Removal of islands from micro-dimple arrays prepared by through-mask electrochemical micromachining
    Chen, Xiaolei
    Qu, Ningsong
    Li, Hansong
    Guo, Zhongning
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2015, 39 : 204 - 211
  • [42] Machining of Metal Microcone Arrays Based on Through-Mask Electrochemical Micromachining with Circumferential Equivalent Etching
    Zhang, Yan
    Zhu, Yujun
    Zhang, Jie
    Bian, Haowen
    Wang, Guoqian
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2023, 170 (08)
  • [43] Investigation of micro pit array on titanium alloy with hydrophobic surface by through-mask electrochemical micromachining
    Meng, Jianbing
    Li, Hongmei
    Zhang, Hongwei
    Dong, Xiaojuan
    Tang, Youquan
    Zhao, Yugang
    Qu, Linghui
    SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES, 2023, 11 (03):
  • [44] Shape evolution during through-mask electrochemical micromachining at low and high aspect ratio.
    Dikusar, AI
    Keloglu, OY
    Yuschenko, SP
    CAS'98 PROCEEDINGS - 1998 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 21ST EDITION, VOLS 1 AND 2, 1998, : 557 - 560
  • [45] Investigation of foamed cathode through-mask electrochemical micromachining developed for uniform texturing on metallic cylindrical surface
    Ming, Pingmei
    Zhao, Chenhao
    Zhang, Xinmin
    Li, Xinchao
    Qin, Ge
    Yan, Liang
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2018, 96 (9-12): : 3043 - 3056
  • [46] Fabrication of a metal protector for a fiber sensor using through-mask electrochemical micromachining with pulse DC power
    Wei-Te Wu
    Wei-Hung Shih
    Chih-To Wang
    Microsystem Technologies, 2011, 17 : 707 - 714
  • [47] Study of Mass Transfer Enhancement of Electrolyte Flow Field by Rotating Cathode in Through-Mask Electrochemical Micromachining
    Wang, Guoqian
    Jiang, Shan
    Ni, Shoudong
    Zhang, Yan
    MICROMACHINES, 2023, 14 (07)
  • [48] Towards understanding uniformity of megasonic-assisted through-mask electrochemical micromachining based on bubble dynamics
    Yu, Mingxin
    Du, Liqun
    Zhai, Ke
    Cheng, Haohao
    Wang, Fenglai
    Li, Aoqi
    Wang, Zhongmin
    JOURNAL OF MANUFACTURING PROCESSES, 2023, 96 : 125 - 137
  • [49] Fabrication of a metal protector for a fiber sensor using through-mask electrochemical micromachining with pulse DC power
    Wu, Wei-Te
    Shih, Wei-Hung
    Wang, Chih-To
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2011, 17 (04): : 707 - 714
  • [50] Investigation of foamed cathode through-mask electrochemical micromachining developed for uniform texturing on metallic cylindrical surface
    Pingmei Ming
    Chenhao Zhao
    Xinmin Zhang
    Xinchao Li
    Ge Qin
    Liang Yan
    The International Journal of Advanced Manufacturing Technology, 2018, 96 : 3043 - 3056