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Recent Advances in Graphene-Based Pressure Sensors: A Review
被引:6
|作者:
Zhang, Zhe
[1
,2
]
Liu, Quan
[1
,2
]
Ma, Hongliang
[1
,2
]
Ke, Ningfeng
[1
,2
]
Ding, Jie
[2
]
Zhang, Wendong
[3
,4
]
Fan, Xuge
[1
,2
,5
]
机构:
[1] Beijing Inst Technol, Adv Res Inst Multidisciplinary Sci, Beijing 100081, Peoples R China
[2] Beijing Inst Technol, Sch Integrated Circuits & Elect, Beijing 100081, Peoples R China
[3] North Univ China, State Key Lab Dynam Measurement Technol, Sch Instrument & Elect, Taiyuan 030051, Peoples R China
[4] North Univ China, Sch Instrument & Elect, Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Peoples R China
[5] Beijing Inst Technol, Sch Phys, Beijing 100081, Peoples R China
基金:
中国国家自然科学基金;
北京市自然科学基金;
关键词:
Pressure sensors;
Graphene;
Sensors;
Microstructure;
Mechanical factors;
Sensitivity;
Pressure measurement;
Flexible pressure sensors;
gas pressure sensors;
graphene;
graphene and its derivatives;
suspended graphene;
HIGH-SENSITIVITY;
CHEMICAL-REDUCTION;
SUSPENDED GRAPHENE;
THERMAL REDUCTION;
SPONGY GRAPHENE;
OXIDE IMPACT;
TRANSPARENT;
FILM;
RANGE;
PERFORMANCE;
D O I:
10.1109/JSEN.2024.3419243
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
In recent years, pressure sensors have been widely used as crucial technology components in industrial, healthcare, consumer electronics, and automotive safety applications. With the development of intelligent technologies, there is a growing demand for pressure sensors with higher sensitivity, smaller size, and wider detection range. Graphene and its derivatives, as novel emerging materials in recent years, have received widespread attention from researchers due to their unique mechanical and electrical properties and are considered as promising sensing materials for high-performance pressure sensors. In general, graphene-based pressure sensors can be classified into flexible pressure sensors and gas pressure sensors. In this article, we first introduce the basic properties of graphene and its derivatives and then review the research progress of both graphene-based flexible pressure sensors and graphene-based gas pressure sensors, respectively, focusing on different sensing mechanisms. Finally, the application prospects of graphene-based pressure sensors as well as future challenges are discussed.
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页码:25227 / 25248
页数:22
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