Design, analysis and experimental characterization of MEMS based one hot-arm electrothermal actuator

被引：0

作者：

Javaid, Faraz ^{[1
]}

Bashir, Uzair ^{[2
]}

Saleem, Muhammad Mubasher ^{[1
,3
]}

Arshad, Adeel ^{[4
]}

Tiwana, Mohsin Islam ^{[1
,3
]}

Ali, Osama ^{[1
,3
]}

机构：

[1] Natl Univ Sci & Technol, Dept Mechatron Engn, Islamabad, Pakistan

[2] Sir Syed CASE Inst Technol, Dept Elect & Comp Engn, Islamabad, Pakistan

[3] Natl Ctr Robot & Automation NCRA, Islamabad, Pakistan

[4] Superior Univ, Fac Engn & Technol, Lahore, Pakistan

来源：

ENGINEERING RESEARCH EXPRESS | 2024年 / 6卷 / 04期

关键词：

MEMS; SOIMUMPs; FEA; electrothermal actuator; FAILURE;

D O I：

10.1088/2631-8695/ad7f27

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The focus of this study is to analyse the temperature, stress, and mechanical displacement distribution of a U-shaped one hot-arm Microelectromechanical System (MEMS) based electrothermal actuator using CoventorWare software. The actuator was fabricated using the commercially available SOIMUMPs process from Science. The Finite Element Method (FEM) simulation results were verified through the experimental characterization of fabricated structure at different actuation voltages and are found to be in good agreement. Furthermore, peak value of actuation voltage is measured before the failure of the electrothermal structure occurs.

引用

页数：15

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