Study on the suppression of parasitic resonance of film bulk acoustic wave resonators

被引：0
|
作者：
Cui, Jiamin [1 ]
Wu, Xiushan [1 ]
Chen, Yuhao [1 ]
Ye, Yiyan [1 ]
Zhou, Xiaowei [1 ]
机构：
[1] The College of Electrical Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, China
来源：
Microelectronics Journal | 2024年 / 154卷
关键词：
25;
D O I：
10.1016/j.mejo.2024.106450
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学科分类号：
摘要：
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