共 53 条
- [21] LIU Qian, Preparation and Performance Test of AlCrSiN/ AlCrN/AlCrON/AlCrN Multilayer Composite Tool Coa-ting, (2021)
- [22] ZHANG Qi-pei, ZHONG Xi-chun, LI Chun-ming, Et al., Synthesis and Mechanical Properties of Ti/TiN/TiAlN Composite Coatings by Arc Ion Plating and Magnetron Sputtering, Chinese Journal of Vacuum Science and Technology, 35, 2, pp. 195-200, (2015)
- [23] ZHOU S Y, YAN S J, HAN B, Et al., Influence of Modulation Period and Modulation Ratio on Structure and Mechanical Properties of TiBN/CrN Coatings Deposited by Multi-Arc Ion Plating, Applied Surface Science, 351, pp. 1116-1121, (2015)
- [24] LIU Hui, YANG Fu-chi, TSAI Y J, Et al., Effect of Modulation Structure on the Microstructural and Mechanical Properties of TiAlSiN/CrN Thin Films Prepared by High Power Impulse Magnetron Sputtering, Surface and Coatings Technology, 358, pp. 577-585, (2019)
- [25] BARSHILIA H C, DEEPTHI B, RAJAM K S, Et al., Growth and Characterization of TiAlN/CrAlN Superlat-tices Prepared by Reactive Direct Current Magnetron Sputtering, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 27, 1, pp. 29-36, (2009)
- [26] CONTRERAS E, BEJARANO G, GOMEZ M., Synthesis and Microstructural Characterization of Nanoscale Mu-ltilayer TiAlN/TaN Coatings Deposited by DC Magnetron Sputtering, The International Journal of Advanced Manufacturing Technology, 101, 1-4, pp. 663-673, (2019)
- [27] RAMADOSS R, KUMAR N, DASH S, Et al., Wear Mechanism of CrN/NbN Superlattice Coating Sliding Against Various Counterbodies, International Journal of Refractory Metals and Hard Materials, 41, pp. 547-552, (2013)
- [28] ZHANG Jing-wen, LI Ze-chao, WANG Yong-xin, Et al., A New Method to Improve the Tribological Performance of Metal Nitride Coating: A Case Study for CrN Coating, Vacuum, 173, (2020)
- [29] PARK J K, BAIK Y J., Increase of Hardness and Thermal Stability of TiAlN Coating by Nanoscale Multi-Layered Structurization with a BN Phase, Thin Solid Films, 516, 11, pp. 3661-3664, (2008)
- [30] VAZ F, REBOUTA L, GOUDEAU P, Et al., Characte-risation of Ti<sub>1–x</sub>Si<sub>x</sub>N<sub>y</sub> Nanocomposite Films, Surface and Coatings Technology, 133-134, pp. 307-313, (2000)