Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industry

被引:0
|
作者
Lim, Keun-Young [1 ]
Jung, Seungho [1 ]
Kim, Sang-Ryung [2 ]
机构
[1] Ajou Univ, Dept Environm & Safety Engn, Suwon 16499, South Korea
[2] Korea Occupat Safety & Hlth Agcy, Incheon 44429, South Korea
关键词
exhaust ventilation; gas box; SEMI F-15; SEMI S6; KS C IEC 60079-10-1; IEC; 60079-10-1; NFPA; 318; tracer gas test; semiconductor manufacturing equipment;
D O I
10.3390/pr12112531
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Hazardous substances such as hydrogen and chlorine are used in semiconductor manufacturing. When these gasses are discharged, they are mixed with outside air and are connected to a treatment facility through a duct inside a gas box. This study investigated an optimal exhaust design to prevent fire explosions and toxic exposure by optimizing the exhaust volume when hazardous substances leak from the gas box of semiconductor manufacturing equipment. In this study, carbon monoxide was used for modeling. A 75 mm duct was used, and the tracer gas was released into the gas box at 15.4 LPM. The concentrations were measured at nine points inside and outside the gas box. According to the test results, in an experiment designed with 0% air intake, the internal leakage concentration was measured to be more than 25% of the LEL (lower explosive limit) for 10 min when leakage occurred due to stagnant flow, and the outside toxicity concentration was also measured to be more than 50% of the TWA (time-weighted average) value. When the air intake ratio was designed to be 100%, there was a point on the outside that exceeded 50% of the TWA, confirming that excessive air intake could also cause gas to leak outside. Finally, when the intake ratio was designed to be 50% in both directions, it was confirmed that the airflow was maintained smoothly, and the hazardous gasses were safely diluted and discharged through the duct. This study was conducted to improve the safety of workers in the field in the event of leakage of flammable and toxic gasses by testing the location and area of the air intake hole in the gas box exhaust port. Through this effort, the aim is to present specific standards for gas box design and to assist in establishing a legal framework or standardized guidelines.
引用
收藏
页数:22
相关论文
共 50 条
  • [31] Comparison of the harm effects of accidental releases: Cryo-compressed hydrogen versus natural gas
    Li, Zhiyong
    Pan, Xiangmin
    Sun, Ke
    Ma, Jianxin
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2013, 38 (25) : 11174 - 11180
  • [32] 3-D dispersion model for simulation of accidental toxic gas releases in a metropolitan area
    Min, Mimi
    Park, Junyong
    Kang, Chankyu
    Jung, Seungho
    JOURNAL OF LOSS PREVENTION IN THE PROCESS INDUSTRIES, 2021, 69
  • [33] Two-Phase Accidental Dense Gas Releases Simulations with the Lagrangian Particle Model Microspray
    Mortarini, L.
    Tinarelli, G.
    Castelli, S. Trini
    Carlino, G.
    Anfossi, D.
    AIR POLLUTION MODELING AND ITS APPLICATION XXIII, 2014, : 367 - 371
  • [34] A comparative analysis of mathematical models for relating indoor and outdoor toxic gas concentrations in accidental releases
    Montoya, Maria I.
    Planas, Eulalia
    Casal, Joaquim
    JOURNAL OF LOSS PREVENTION IN THE PROCESS INDUSTRIES, 2009, 22 (04) : 381 - 391
  • [35] New Tracers Identify Hydraulic Fracturing Fluids and Accidental Releases from Oil and Gas Operations
    Warner, N. R.
    Darrah, T. H.
    Jackson, R. B.
    Millot, R.
    Kloppmann, W.
    Vengosh, A.
    ENVIRONMENTAL SCIENCE & TECHNOLOGY, 2014, 48 (21) : 12552 - 12560
  • [36] Investigation of an unknown hydride gas emission in the semiconductor industry
    Colorado State University, United States
    SESHA J. Semicond. Environ. Saf. Health Assoc., 2007, : 2007 - 2008
  • [37] A fuzzy logic approach to modeling consequence of accidental releases of liquid natural gas to sea water
    Siuta, Dorota
    Markowski, Adam S.
    PRZEMYSL CHEMICZNY, 2017, 96 (05): : 1105 - 1108
  • [38] Emergency response for tackling major accidental toxic gas releases: What should be done and when?
    Jiang, Yanli
    Xu, Ke
    Gai, Wenmei
    Salhi, Said
    SAFETY SCIENCE, 2022, 154
  • [39] Food Delivery Box by Utilizing Exhaust Gas from Motorcycle Engine Combustion
    Ubaidillah, U.
    Cakrawala, Bioma
    Yaningsih, Indri
    INTERNATIONAL JOURNAL OF HEAT AND TECHNOLOGY, 2023, 41 (03) : 581 - 590
  • [40] Gas cleaning systems of decentralized hazardous waste incinerators in the chemical industry
    Lehner, M
    Hoffmann, A
    CHEMIE INGENIEUR TECHNIK, 2003, 75 (07) : 823 - 830