Understanding the Self-Heating Effects Measured With the AC Output Conductance Method in Advanced FinFET Nodes

被引：0
|
作者：
Tondelli, L. [1 ]
Asanovski, R. [1 ,2 ]
Scholten, A.J. [3 ]
Dinh, T.V. [4 ]
Tam, S.-W. [5 ]
Pijper, R.M.T. [3 ]
Selmi, L. [1 ]
机构：
[1] Università di Modena e Reggio Emilia, Department of Engineering Enzo Ferrari, Modena,41121, Italy
[2] Imec, Leuven,3001, Belgium
[3] Nxp Semiconductors, Eindhoven,5656, Netherlands
[4] Nxp Semiconductors, Austin,TX,78735, United States
[5] Nxp Semiconductors, San Jose,CA,95134, United States
来源：
IEEE Transactions on Electron Devices | 2024年 / 71卷 / 11期
关键词：
FinFET;
D O I：
10.1109/TED.2024.3469187
中图分类号：
学科分类号：
摘要：
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收藏
页码：6976 / 6982
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