Micro device modeling method and design for manufacturability

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School of Mechatronic Engineering, Xian Technological University, China [1 ]
机构：
[1] Liu, Zheng
[2] Sun, Bo
来源：
Liu, Z. (zheng.liumail@gmail.com) | 1600年 / Universitas Ahmad Dahlan, Jalan Kapas 9, Semaki, Umbul Harjo,, Yogiakarta, 55165, Indonesia卷 / 11期
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