Microcylinder pump employing 0.57Pb(Sc1/2Nb1/2) O3–0.43PbTiO3 piezoelectric actuator

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作者：
机构：
[1] Pečar, B.
[2] Uršič, H.
[3] Malič, B.
[4] Možek, M.
[5] Vrtačnik, D.
来源：
Pečar, B. (borut.pecar@fe.uni-lj.si) | 1600年 / National Institute of Optoelectronics卷 / 19期
关键词：
Back pressures - Excitation amplitudes - Micro cylinders - Micro pump - Piezoelectric micropumps - Relaxor ferroelectric - Relaxor ferroelectric materials - Relaxors;
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摘要：
The microcylinder pumps employing piezoelectric actuators based on relaxor-ferroelectric 0.57Pb(Sc1/2Nb1/2)O3–0.43PbTiO3 are fabricated and characterized. The prototypes with 6 mm chamber diameter and with a modified outlet rectifying element feature high water / air flowrate performance (up to 1 ml min-1 / up to 3.8 ml min-1) and backpressure performance (up to 215 mbar / up to 65 mbar) at the excitation amplitude of 130 V. To our knowledge, it is the first time the relaxor-ferroelectric material has been employed in a piezoelectric micropump application.
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页码：9 / 10
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