Silicon micromachined ultrasonic transducers

被引：0
|
作者：
Khuri-Yakub, Butrus T. [1 ]
Cheng, Ching-Hsiang [1 ]
Degertekin, Fahrettin-Levent [1 ]
Ergun, Sanli [1 ]
Hansen, Sean [1 ]
Jin, Xue-Cheng [1 ]
Oralkan, Omer [1 ]
机构：
[1] Stanford Univ, Stanford, United States
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 5 B期
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摘要：
8
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页码：2883 / 2887
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