Silicon micromachined ultrasonic transducers

被引：0
|
作者：
Khuri-Yakub, Butrus T. [1 ]
Cheng, Ching-Hsiang [1 ]
Degertekin, Fahrettin-Levent [1 ]
Ergun, Sanli [1 ]
Hansen, Sean [1 ]
Jin, Xue-Cheng [1 ]
Oralkan, Omer [1 ]
机构：
[1] Stanford Univ, Stanford, United States
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 5 B期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：2883 / 2887
相关论文
共 50 条
  • [1] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, BT
    Degertekin, FL
    Jin, XC
    Calmes, S
    Ladabaum, I
    Hansen, S
    Zhang, XJ
    1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 985 - 991
  • [2] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, BT
    Cheng, CH
    Degertekin, FL
    Ergun, S
    Hansen, S
    Jin, XC
    Oralkan, O
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (5B): : 2883 - 2887
  • [3] Silicon micromachined ultrasonic transducers
    Khuri-Yakub, B.T.
    Degertekin, F.L.
    Jin, X.-C.
    Calmes, S.
    Ladabaum, I.
    Hansen, S.
    Zhang, X.J.
    Proceedings of the IEEE Ultrasonics Symposium, 1998, 2 : 985 - 991
  • [4] Simulation of silicon micromachined ultrasonic transducers
    Ge, LF
    FIFTH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY, 2003, 5253 : 15 - 18
  • [5] Silicon micromachined ultrasonic immersion transducers
    Soh, HT
    Ladabaum, I
    Atalar, A
    Quate, CF
    KhuriYakub, BT
    APPLIED PHYSICS LETTERS, 1996, 69 (24) : 3674 - 3676
  • [6] Porous Silicon as Backing Material for Capacitive Micromachined Ultrasonic Transducers
    Lascaud, Julie
    Boulme, Audren
    Gross, Dominique
    Bahette, Emilie
    Defforge, Thomas
    Alquier, Daniel
    Gautier, Gael
    Certon, Dominique
    2016 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2016,
  • [7] Novel silicon nitride micromachined wide bandwidth ultrasonic transducers
    Noble, RA
    Bozeat, RJ
    Robertson, TJ
    Billson, DR
    Hutchins, DA
    1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 1081 - 1084
  • [8] Ultrasonic measurements on micromachined transducers
    Andrews, MK
    Harris, PD
    Turner, GC
    EUROSENSORS XII, VOLS 1 AND 2, 1998, : 117 - 120
  • [9] Curved micromachined ultrasonic transducers
    Wong, KA
    Panda, S
    Ladabaum, I
    2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 572 - 576
  • [10] Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers
    GE LiFeng School of Electronic Science and Technology
    Science in China(Series E:Technological Sciences), 2007, (05) : 674 - 682
12345