Surface acoustic wave (SAW) ammonia gas sensor based on the ZnO nanorod array

被引：0
|
作者：
Ma J. [1 ]
Mao S. [1 ]
Wang L. [1 ]
Tang Y. [2 ]
Li Z. [2 ]
Du B. [1 ]
Yang J. [1 ]
Jiang H. [1 ]
Ao D. [2 ]
Zu X. [2 ]
机构：
[1] 26th Institute of China Electronics Technology Group Corporation, Chongqing
[2] Institute of Fundamental and Frontier Sciences, School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu
来源：
Ma, Jinyi (ma_jinyi163@163.com) | 1600年 / American Scientific Publishers卷 / 14期
关键词：
Ammonia; Nanorod; SAW sensor; ZnO;
D O I：
10.1166/sl.2016.3681
中图分类号：
学科分类号：
摘要：
Surface acoustic wave (SAW) sensors based on ZnO nanorod array for ammonia detection were investigated at room temperature. The ZnO nanorod array was synthesized by a hydrothermal process. The length and width of the nanorod were 1 μm and 100 nm, respectively. The XRD and AFM characterizations showed that the ZnO nanorod array was highly crystallinity and oriented. Compared to the flat film, the ZnO array had much higher specific surface area, which was beneficial for the gas sensing property. The sensor exhibited a negative frequency shift of 300 Hz to 50 ppm ammonia, and also showed excellent stability, reproducibility at room temperature. Copyright © 2016 American Scientific Publishers All rights reserved.
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页码：673 / 677
页数：4
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