Design and analysis of 1-DOF nano-positioning stage

A novel 1-DOF displacement stage with large motion range and nano-positioning precision was developed. The stage was a set of two grades mechanism, that was coarse and fine positioning mechanism. A diffraction grating was fixed to the stage to form a close loop displacement measuring system. The theory of mechanics was used to analysis the behavior of PZT actuated and flexure hinge guided fine positioning mechanism and the finite element analysis was also performed. The stage was used in the profiler of white-light interferometry successfully. A measuring example was also presented.