Room temperature nanoimprint technology using hydrogen silsequioxane (HSQ)

被引：0
|
作者：
Igaku, Yutaka [1 ]
Matsui, Shinji [1 ]
Ishigaki, Hiroyuki [1 ]
Fujita, Jun-Ichi [2 ]
Ishida, Masahiko [3 ]
Ochiai, Yukinori [1 ]
Namatsu, Hideo [3 ]
Komuro, Masanori [4 ]
Hiroshima, Hiroshi [3 ]
机构：
[1] Laboratory of Advanced Science and Technology, Himeji Institute of Technology, Hyogo 678-1201, Japan
[2] NEC Fundamental Research Laboratories, 34 Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
[3] NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
[4] Advanced Semiconductor Research Center, AIST, 1-1 Umezono 1-chome, Tsukuba, Ibaraki 305-8501, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 6 B期
关键词：
D O I：
10.1143/jjap.41.4198
中图分类号：
学科分类号：
摘要：
14
引用
收藏
页码：4198 / 4202
相关论文
共 50 条
  • [31] Optical module fabrication using nanoimprint technology
    Rossi, Markus
    Rudmann, Hartmut
    Westenhfer, Susanne
    Salt, Martin
    Pelzer, Rainer
    MICROMACHING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS IV, 2006, 6110
  • [32] Room-temperature nanoimprinting using ladder hydrogen silsesquioxane
    Nakamatsu, Ken-ichiro
    Ishikawa, Kiyoshi
    Taneichi, Noriaki
    Matsui, Shinji
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (8A): : 5388 - 5390
  • [33] Hydrogen purification using room-temperature ionic liquids
    Yokozeki, A.
    Shiflett, Mark B.
    APPLIED ENERGY, 2007, 84 (03) : 351 - 361
  • [34] Repeatable hydrogen adsorption using nanostructured graphite at room temperature
    Kajiura, H
    Kadono, K
    Tsutsui, S
    Murakami, Y
    APPLIED PHYSICS LETTERS, 2003, 82 (12) : 1929 - 1931
  • [35] Hydrogen storage at room temperature
    Ellis, Meagan
    MATERIALS WORLD, 2008, 16 (02) : 8 - 8
  • [36] Patterning layered polymeric multilayer films by room-temperature nanoimprint lithography
    Lu, YX
    Hu, W
    Ma, Y
    Zhang, LB
    Sun, JQ
    Lu, N
    Shen, JC
    MACROMOLECULAR RAPID COMMUNICATIONS, 2006, 27 (07) : 505 - 510
  • [37] Room-temperature nanoimprint lithography of non-thermoplastic organic films
    Pisignano, D
    Persano, L
    Raganato, MF
    Visconti, P
    Cingolani, R
    Barbarella, G
    Favaretto, L
    Gigli, G
    ADVANCED MATERIALS, 2004, 16 (06) : 525 - +
  • [38] Room temperature hydrogen gas sensor using candle carbon soot
    Dhall, Shivani
    Mehta, B. R.
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2020, 45 (29) : 14997 - 15002
  • [39] Digital autoradiography using room temperature CCD and CMOS imaging technology
    Cabello, Jorge
    Bailey, Alexis
    Kitchen, Ian
    Prydderch, Mark
    Clark, Andy
    Turchetta, Renato
    Wells, Kevin
    PHYSICS IN MEDICINE AND BIOLOGY, 2007, 52 (16): : 4993 - 5011
  • [40] Significant glass transition temperature increase based on polyhedral oligomeric silsequioxane (POSS) copolymer through hydrogen bonding
    Hongyao Xu
    Shiao-Wei Kuo
    Feng-Chih Chang
    Polymer Bulletin, 2002, 48 : 469 - 474
12345