共 50 条
- [44] An in-situ method for measuring the wafer flatness Guangzi Xuebao/Acta Photonica Sinica, 2006, 35 (12): : 1975 - 1979
- [45] Topometric on-line flatness measuring system for the control of hot strip flatness. STAHL UND EISEN, 1998, 118 (04): : 79 - +
- [46] An instrument for measuring flatness by using laser and CCD FLATNESS, ROUGHNESS, AND DISCRETE DEFECT CHARACTERIZATION FOR COMPUTER DISKS, WAFERS, AND FLAT PANEL DISPLAYS, 1996, 2862 : 183 - 186
- [47] FIZEAU INTERFEROMETER FOR MEASURING FLATNESS OF OPTICAL SURFACES APPLIED OPTICS, 1968, 7 (02): : 331 - &