Fabrication and characteristics of Si-based Ge waveguide photodetectors

被引:0
|
作者
Chen, Li-Qun [1 ]
Zhou, Zhi-Wen [2 ]
Li, Cheng [2 ]
Lai, Hong-Kai [2 ]
Chen, Song-Yan [2 ]
机构
[1] Chengyi College, Jimei University, Xiamen 361021, China
[2] Semiconductor Photonics Research Center, Department of Physics, Xiamen University, Xiamen 361005, China
关键词
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学科分类号
摘要
Waveguides
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页码:1012 / 1015
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