Influences of temperature and stress on transmission characteristics of multilayer thin-film narrow bandpass filters

被引:0
|
作者
Chen, Tei-Chen [1 ]
Kuo, Jing-I. [1 ]
Lee, Wei-Lung [1 ]
Lee, Cheng-Chung [2 ]
机构
[1] Department of Mechanical Engineering, National Cheng Kung University, Tainan 701, Taiwan
[2] Institute of Optical Sciences, National Central University, Chung-Li, Taiwan
关键词
Film thickness - Ion assisted deposition - Multilayer thin film narrow bandpass filters - Optical characteristics - Thermooptical effects;
D O I
10.1143/jjap.40.4087
中图分类号
学科分类号
摘要
In this study, an analytical model is developed to evaluate the effects of uniform and nonuniform temperature increases, as well as stress level, on the optical characteristics of three-cavity sub-nanometer bandpass filters fabricated using TiO2 and SiO2 film materials through ion-assisted deposition (IAD), taking into account the coupled photoelastic and thermo-optical effects. A more realistic stress analysis, which is capable of considering the effects of intrinsic and thermal stresses, bending moment as well as nonuniform temperature increase, is proposed and formulated for the first time. Various factors, including errors in film thickness, changes of refractive index and film thickness due to temperature increase and stress as well as the delamination gap along the layer interface, are then considered to evaluate their individual influence on optical characteristics of bandpass filters. The results show that the change of film thickness due to temperature increase and stress has a significant effect on center wavelength shift. Moreover, a significant degradation of the transmission curve due to nonuniform temperature increase was observed.
引用
收藏
页码:4087 / 4096
相关论文
共 50 条
  • [31] Thin-film spatial filters
    Moreno, I
    Araiza, JJ
    Avendano-Alejo, M
    OPTICS LETTERS, 2005, 30 (08) : 914 - 916
  • [32] MAGNETIC AND RECORDING CHARACTERISTICS OF MULTILAYER CONICR THIN-FILM MEDIA
    HATA, H
    HYOHNO, T
    FUKUICHI, T
    YABUSHITA, K
    UMESAKI, M
    SHIBATA, H
    IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) : 2709 - 2712
  • [33] Ultra-low-stress thin-film interference filters
    Ockenfuss, GJ
    Klinger, RE
    APPLIED OPTICS, 2006, 45 (07) : 1364 - 1367
  • [34] Multilayer Thin-Film Optical Filters for Reflectance-Based Malaria Diagnostics
    Costa, Mariana S.
    Baptista, Vitoria
    Ferreira, Gabriel M.
    Lima, Duarte
    Minas, Graca
    Veiga, Maria Isabel
    Catarino, Susana O.
    MICROMACHINES, 2021, 12 (08)
  • [35] Study of transmission of multilayer thin-film X-ray guides
    Dudchik, Yu.I.
    Komarov, F.F.
    Lobotsky, D.G.
    Soloviev, V.S.
    Tishkov, V.S.
    Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1993, A325 (1-2) : 343 - 345
  • [36] A STUDY OF TRANSMISSION OF MULTILAYER THIN-FILM X-RAY GUIDES
    DUDCHIK, YI
    KOMAROV, FF
    LOBOTSKY, DG
    SOLOVIEV, VS
    TISHKOV, VS
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1993, 325 (1-2): : 343 - 345
  • [37] Diffractive narrow-band transmission filters based on guided-mode resonance effects in thin-film multilayers
    Tibuleac, S
    Magnusson, R
    IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (04) : 464 - 466
  • [38] ODDS NARROW FOR THIN-FILM SOLAR
    Bomgardner, Melody M.
    CHEMICAL & ENGINEERING NEWS, 2013, 91 (20) : 20 - 21
  • [39] STEADY-STATE TEMPERATURE PROFILES IN NARROW THIN-FILM CONDUCTORS
    SHIRLEY, CG
    JOURNAL OF APPLIED PHYSICS, 1985, 57 (03) : 777 - 784
  • [40] EVALUATING THE ZERO CREEP CONDITIONS FOR THIN-FILM AND MULTILAYER THIN-FILM SPECIMENS
    JOSELL, D
    CORIELL, SR
    MCFADDEN, GB
    ACTA METALLURGICA ET MATERIALIA, 1995, 43 (05): : 1987 - 1999