Aluminum alloy sputtering target for TFT-LCDs

被引：0
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作者：
Yoshikawa, Kazuo
Onishi, Takashi
机构：
来源：
R and D: Research and Development Kobe Steel Engineering Reports | 2002年 / 52卷 / 02期
关键词：
Electronic components - LCD manufacturers - Spray forming - Sputtering target;
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页码：2 / 5
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