Surface Wave Plasma Oxidation at Low Temperature under Rare Gas Dilution

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作者：
Goto, Masashi [1 ]
Azuma, Kazufumi [1 ]
Okamoto, Tetsuya [1 ]
Nakata, Yukihiko [1 ]
机构：
[1] Goto, Masashi
[2] Azuma, Kazufumi
[3] Okamoto, Tetsuya
[4] Nakata, Yukihiko
来源：
Goto, M. | 1600年 / Japan Society of Applied Physics卷 / 42期
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页码：7033 / 7038
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