Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

被引：0
|
作者：
Shan, Wei [1 ]
Yao, Man-Wen [1 ]
Hu, Bao-Fu [1 ]
Yang, Peng-Fei [1 ]
Yao, Xi [1 ]
机构：
[1] Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2013年 / 44卷 / 04期
关键词：
18;
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页码：581 / 584
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