Preparation and electrical properties of insulating aluminum oxide thin films by sol-gel process

被引：0
|
作者：
Shan, Wei [1 ]
Yao, Man-Wen [1 ]
Hu, Bao-Fu [1 ]
Yang, Peng-Fei [1 ]
Yao, Xi [1 ]
机构：
[1] Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2013年 / 44卷 / 04期
关键词：
18;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：581 / 584
相关论文
共 50 条
  • [1] Preparation and properties of transparent conductive aluminum-doped zinc oxide thin films by sol-gel process
    Alam, MJ
    Cameron, DC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (04): : 1642 - 1646
  • [2] Preparation and Characterization of Molybdenum Oxide Thin Films by Sol-Gel Process
    Sun Jiebing
    Xiong Rui
    Wang Shimin
    Tang Wufeng
    Tong Hua
    Shi Jing
    Journal of Sol-Gel Science and Technology, 2003, 27 (3) : 315 - 319
  • [3] Preparation and characterization of molybdenum oxide thin films by sol-gel process
    Sun, JB
    Xiong, R
    Wang, SM
    Tang, WF
    Tong, H
    Shi, J
    JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 2003, 27 (03) : 315 - 319
  • [4] Preparation of Insulating SiO2 Nanostructured Thin Films by the Sol-Gel Process
    Hsieh, Tung-Li
    Chu, Ann-Kuo
    Huang, Wen-Yao
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2013, 13 (01) : 279 - 287
  • [5] PREPARATION OF PZT THIN-FILMS BY SOL-GEL PROCESS AND PROPERTIES
    SAKAI, H
    TUCHIYA, T
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1991, 99 (07): : 630 - 634
  • [6] PREPARATION AND PROPERTIES OF PGO THIN-FILMS BY THE SOL-GEL PROCESS
    KATO, E
    SEI, T
    TSUCHIYA, T
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 178 : 333 - 339
  • [7] SOL-GEL PROCESS IN ELECTROCHEMISTRY .3. PREPARATION AND PROPERTIES OF THIN-FILMS FOR ELECTRONICS BY THE SOL-GEL PROCESS
    TOHGE, N
    MINAMI, T
    DENKI KAGAKU, 1992, 60 (09): : 765 - 770
  • [8] Structural and electrical properties of aluminum-doped zinc oxide films prepared by sol-gel process
    Tahar, RB
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (14) : 3301 - 3306
  • [9] Properties of aluminum doped zinc oxide thin film by sol-gel process
    Yi, Sung-Hak
    Choi, Seung-Kyu
    Jang, Jae-Min
    Kim, Jung-A
    Jung, Woo-Gwang
    NANOPHOTONICS, NANOSTRUCTURE, AND NANOMETROLOGY II, 2008, 6831
  • [10] Electrical and Optical Properties of Copper Oxide Thin Films by Sol-Gel Technique
    Hashim, H.
    Shariffudin, S. S.
    Saad, P. S. M.
    Ridah, H. A. M.
    4TH INTERNATIONAL CONFERENCE ON ELECTRONIC DEVICES, SYSTEMS AND APPLICATIONS 2015 (ICEDSA), 2015, 99
12345