共 50 条
- [2] Inductively coupled Ar plasma damage in AlGaAs [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1997, 144 (09) : L245 - L247
- [6] Optical emission spectroscopy of pulsed inductively coupled plasma in Ar [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2001, 40 (11A): : L1183 - L1186
- [8] Diagnostics of an inductively coupled CF4/Ar plasma [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2000, 18 (03): : 864 - 872
- [9] Optical emission spectroscopy of pulsed inductively coupled plasma in Ar [J]. Hioki, K., 2001, Japan Society of Applied Physics (40):