Preparation and characterization of in-plane polarized PZT piezoelectric diaphragms

被引：0
|
作者：
Yin, Yi [1 ]
Qi, Kangcheng [1 ]
Xu, Zhicai [1 ]
Zeng, Yugong [1 ]
Lin, Zulun [1 ]
机构：
[1] School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China
来源：
Chinese Optics Letters | 2013年 / 11卷 / SUPPL.1期
关键词：
Interdigitated electrodes - Lithographic process - Orientation-dependent wet etching - Piezoelectric diaphragms - Sensors and actuators - Silicon substrates - Sol-gel technique - Threedimensional (3-d);
D O I：
10.3788/COL201311.S10403
中图分类号：
学科分类号：
摘要：
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