Mass spectroscopy study of residual gases in vacuum electronic devices and its storage lifetime

被引：0
|
作者：
Cui, Yunkang [1 ,2 ]
Zhang, Xiaobing [1 ]
Lei, Wei [1 ]
Xiao, Mei [1 ]
Di, Yunsong [1 ]
Wang, Jinchan [1 ]
Mao, Fuming [1 ]
机构：
[1] School of Electronic Science and Engineering, Southeast University, Nanjing 210096, China
[2] Dept. of Basic Courses, Nanjing Institute of Technology, Nanjing 210013, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2007年 / 27卷 / 01期
关键词：
Atmospheric pressure - Electronic equipment - Gases - Getters - Mass spectrometry;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A novel technique was developed for fast testing the storage lifetime of vacuum electronic devices with getter inside by mass spectroscopy. Filling in argon at atmospheric pressure for the vacuum electronic device is the main idea. Residual gases in the devices were studied with quadrupole mass spectroscopy (QMS). We found that the residual gases background in the vacuum chamber and the getter of the device little affect the test.
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页码：80 / 83
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