Effect of an atmospheric pressure plasma cleaning on the outgassing characteristics of MgO layer for plasma display panel

被引：0

作者：

Song, Byoung Kwan ^{[1
]}

Lee, Young Joon ^{[1
]}

Yi, Chang Heon ^{[1
]}

Hwang, Hyun Ki ^{[1
]}

Yeom, Geun Young ^{[1
]}

机构：

[1] Department of Materials Engineering, SungKyunKwan University, Suwon, Kyunggi-do 440-746, Korea, Republic of

来源：

| 2003年 / Japan Society of Applied Physics卷 / 42期

关键词：

Atmospheric pressure - Degassing - Deposition - Glass - Magnesia - Pressure effects - Secondary emission - Temperature - Vapor pressure;

D O I：

10.1143/jjap.42.l74

中图分类号：

学科分类号：

摘要：

In this study, the effects of atmospheric pressure plasma cleaning on the outgassing characteristics of MgO deposited on plasma display panel(PDP) glass have been investigated as a function of outgassing temperature. After the cleaning of the MgO deposited glass with He/O2/Ar and He/O2/Ar/N2, the decrease of main outgassing species such H2O, CO2, CO, and H2 and the increase of secondary electron emission from the MgO surface could be observed, possibly due to the removal of organic materials incorporated on the MgO layer. As the cleaning by He/O2/Ar/N2 showed, a lower outgassing vapor pressure, is possibly due to a higher cleaning rate.

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