Uniform Sb doping of ZnO films with controllable morphology and enhanced optical property

被引:0
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作者
Qi, Lin [1 ]
Song, Zhenzhu [1 ]
Yu, Shifeng [1 ]
Qi, Yujie [2 ]
Yu, Hui [1 ]
Zhang, He [1 ]
Jin, Xiaoshi [1 ]
Qi, Yang [3 ]
Li, Xin [1 ]
机构
[1] School of Information Science and Engineering, Shenyang University of Technology, Shenyang,110870, China
[2] Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang,110016, China
[3] Institute of Materials Physics and Chemistry, School of Materials Science and Engineering, Northeastern University, Shenyang,110819, China
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D O I
10.1016/j.vacuum.2024.113605
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