Effects of pulse power and argon flux flow rate on mechanical and tribological properties of diamond-like carbon coatings prepared using high power impulse magnetron sputtering technology

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作者：
Kao, W.H. [1 ]
Su, Y.L. [2 ]
Horng, J.H. [3 ,4 ]
Yu, C.C. [2 ]
机构：
[1] Department of Automation Engineering And Institute of Mechatronoptic Systems, Chienkuo Technology University, Changhua, Taiwan
[2] Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
[3] Department of Power Mechanical Engineering, National Formosa University, Yunlin, Taiwan
[4] Smart Machine and Intelligent Manufacturing Research Center, National Formosa University, Huwei,Yunlin, Taiwan
来源：
Thin Solid Films | 2020年 / 693卷
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