共 50 条
- [41] Shearing interferometry for at wavelength wavefront measurement of extreme-ultraviolet lithography projection optics JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (9A): : 5844 - 5847
- [42] Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2013, 31 (06):
- [49] AN OPTICS FREE SPECTROMETER FOR THE EXTREME-ULTRAVIOLET NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1994, 347 (1-3): : 472 - 474
- [50] Tomographic extreme-ultraviolet spectrographs: TESS Applied Optics, 2000, 39 (22): : 3991 - 3999