Research on electromagnetic excitation resonant sensor based on microelectromechanical system

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作者：
Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, No.74 of Xufu Road, Nangang district, Haerbin, Heilongjiang Province, China [1 ]
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来源：
Telkomnika Telecomun. Compt. Electr. Control | / 4卷 / 1121-1126期
关键词：
13;
D O I：
10.12928/TELKOMNIKA.v13i4.1740
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