High-mobility poly-Si thin film transistors fabricated on stainless-steel foils by low-temperature processes using sputter-depositions

被引：0
|
作者：
Serikawa, Tadashi [1 ]
Omata, Fujio [1 ]
机构：
[1] NTT Cyber Space Lab, Tokyo, Japan
来源：
| 2000年 / JJAP, Tokyo卷 / 39期
关键词：
Glow discharge sputtering;
D O I：
10.1143/jjap.39.l393
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Oxide Thinning and Structure Scaling Down Effect of Low-Temperature Poly-Si Thin-Film Transistors
    Ma, William Cheng-Yu
    Chiang, Tsung-Yu
    Lin, Je-Wei
    Chao, Tien-Sheng
    JOURNAL OF DISPLAY TECHNOLOGY, 2012, 8 (01): : 12 - 17
  • [42] Low-temperature (< 100°C) poly-si thin film fabrication on glass
    Wang, Cheng-Long
    Fan, Duo-Wang
    Sun, Shuo
    Zhang, Fu-Jia
    Liu, Hong-Zhong
    Chinese Physics Letters, 2009, 26 (01)
  • [43] The metal-induced crystallization of poly-Si and the mobility enhancement of thin film transistors fabricated on a glass substrate
    Nguyen, Thanh Nga
    Nguyen, Van Duy
    Jung, Sungwook
    Yi, Junsin
    MICROELECTRONIC ENGINEERING, 2010, 87 (11) : 2163 - 2167
  • [44] High-quality polycrystalline Si TFTs fabricated on stainless-steel foils by using sputtered Si films
    Serikawa, T
    Omata, F
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2002, 49 (05) : 820 - 825
  • [45] Hybrid-type Temperature Sensor using n-type Low-temperature Processed poly-Si Thin-Film Transistors
    Kitajima, Shuhei
    Kito, Katsuya
    Hayashi, Hisashi
    Matsuda, Tokiyoshi
    Kimura, Mutsumi
    2015 IEEE INTERNATIONAL MEETING FOR FUTURE OF ELECTRON DEVICES, KANSAI (IMFEDK), 2015,
  • [46] A high-gain two-stage amplifier using low-temperature poly-si oxide thin-film transistors with a Corbino structure
    Jeon, Dong-Hwan
    Jeong, Won-Been
    Park, Jeong-Soo
    Chung, Hoon-Ju
    Lee, Seung-Woo
    JOURNAL OF INFORMATION DISPLAY, 2022, 23 (04) : 281 - 286
  • [47] A novel selected area laser assisted (SALA) system for crystallization and doping processes in low-temperature poly-Si thin-film transistors
    Ishihara, Ryoichi
    Glazer, Arie
    Raab, Yoel
    Rusian, Peter
    Dorfan, Mannie
    Lavi, Benzi
    Leizerson, Ilya
    Kishinevsky, Albert
    Van Andel, Yvonne
    Cao, Xin
    Metselaar, Wim
    Beenakker, Kees
    Stolyarova, Sara
    Nemirovsky, Yael
    IEICE TRANSACTIONS ON ELECTRONICS, 2006, E89C (10) : 1377 - 1382
  • [48] High-Mobility Amorphous InGaZnO Thin-Film Transistors With Nitrogen Introduced via Low-Temperature Annealing
    Yu, Yining
    Lv, Nannan
    Zhang, Dongli
    Wei, Yiran
    Wang, Mingxiang
    IEEE ELECTRON DEVICE LETTERS, 2021, 42 (10) : 1480 - 1483
  • [49] A novel selected area laser assisted (SALA) system for crystallization and doping processes in low-temperature poly-Si thin-film transistors
    Ishihara, R.
    Glazer, A.
    Raab, Y.
    Rusian, P.
    Dorfan, M.
    Lavi, B.
    Leizerson, I.
    Kishinevsky, A.
    van Aandel, Y.
    Cao, X.
    Metselaar, J. W.
    Beenakker, C. I. M.
    Stolyarova, S.
    Nemirovsky, Y.
    IDW/AD '05: PROCEEDINGS OF THE 12TH INTERNATIONAL DISPLAY WORKSHOPS IN CONJUNCTION WITH ASIA DISPLAY 2005, VOLS 1 AND 2, 2005, : 961 - 964
  • [50] Process induced instability and reliability issues in low temperature poly-Si thin film transistors
    Chen, Chih-Yang
    Wang, Shen-De
    Shieh, Ming-Shan
    Chen, Wei-Cheng
    Lin, Hsiao-Yi
    Yeh, Kuan-Lin
    Lee, Jam-Wen
    Lei, Tan-Fu
    2006 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 44TH ANNUAL, 2006, : 713 - +
12345