Optimization of W-band interaction structure developed using three different micro-fabrication techniques

被引：0
|
作者：
Jain, Sahil [1 ,2 ]
Vishant, Maninder [1 ]
Kaur, Maninder [1 ]
Kumar, Niraj [1 ]
机构：
[1] CSIR Cent Elect Engn Res Inst CEERI, Pilani 333031, India
[2] Acad Sci & Innovat Res AcSIR, Ghaziabad 201002, India
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2024年 / 95卷 / 10期
关键词：
Compendex;
D O I：
10.1063/5.0214209
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this paper, an experimental investigation has been performed for the three different micro-fabrication techniques for optimization in the development process of the W-band planar beam-wave interaction structure. The W-band planar beam-wave interaction structure has been developed using three different micro-fabrication methods, namely micro-EDM (electric discharge milling), wire-EDM, and micro-milling. The effect of each fabrication method on the developed structure is analyzed using scanning electron microscopy and ZETA 3D optical microscopy for their optimization. The experimental analysis has been performed for the developed W-band planar beam-wave interaction structure with an optimized process to achieve a dimensional deviation of less than 10 mu m and surface roughness of less than 50 nm.
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页数：6
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