Single-ion micromechanics

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作者：
Fischer, B.E.
Metzger, S.
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来源：
| 2000年 / Materials Research Society, Warrendale, PA, United States卷 / 25期
关键词：
Crystal lattices - Crystal microstructure - Electron irradiation - Heavy ions - High energy physics - Ion bombardment - Lithography - Photons - Semiconducting germanium - Transmission electron microscopy - Uranium - X rays;
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摘要：
An account is given on the production of different types of microstructures using high-energy heavy-ion beams, a process called single-ion micromechanics. The formation of high-resolution 'radiation shadows' using unfocused, high-energy heavy ions is described. Further, the production of microstructures using precisely aimed single ions and the technology underlying this process using a microprobe are discussed.
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